An Introduction to Microelectromechanical Systems Engineering (Artech House Mems Library)
|von Nadim Maluf|
Synopsis A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
The author, Nadim Maluf , 14. März 2000 Don't know much about MEMS? This book is for you. The book introduces the emerging field of microelectromechanical systems (MEMS) to readers with little or no previous knowledge of the field. It is a book by a "MEMS-professional" for "non-MEMS-individuals." In this book, I focussed on the commercial applications of MEMS (instead of gee-whiz demonstrations) to provide company executives, managers, scientists and students alike with a basic understanding of the technology. If you have taken one year of college physics (or...
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